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E-beam: Ecosystem investment grows, but more neede

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9/20/2010 11:05 PM EDT

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double-o-nothing
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re: E-beam: Ecosystem investment grows, but more neede
double-o-nothing   9/23/2010 12:13:10 PM
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This is a really nice piece, thanks very much. Perhaps some comments, more general in nature, are in order. First, going down below 40 nm, no matter what radiation you use, the resist is going to limit you, either in throughput or resolution. Particularly these chemically amplified types. Second, at the same dose, smaller features use less incident particles (photons, electrons, etc.) so are naturally more prone to random dose variations (sometimes called shot noise). Third, the CD vs dose model needs to be discussed much more openly especially as more critical features are being added.

double-o-nothing
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re: E-beam: Ecosystem investment grows, but more neede
double-o-nothing   11/15/2010 1:06:47 PM
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Charging is another inevitable factor that needs to be possibly captured by DFEB.

unknown multiplier
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re: E-beam: Ecosystem investment grows, but more neede
unknown multiplier   11/15/2010 2:16:52 PM
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Isn't it just one more random electron scattering factor?

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