Breaking News
Blog

E-beam: Ecosystem investment grows, but more neede

Blog
9/20/2010 11:05 PM EDT

 5 comments   post a comment
NO RATINGS
View Comments: Threaded | Newest First | Oldest First
double-o-nothing
User Rank
Rookie
re: E-beam: Ecosystem investment grows, but more neede
double-o-nothing   9/23/2010 12:13:10 PM
NO RATINGS
This is a really nice piece, thanks very much. Perhaps some comments, more general in nature, are in order. First, going down below 40 nm, no matter what radiation you use, the resist is going to limit you, either in throughput or resolution. Particularly these chemically amplified types. Second, at the same dose, smaller features use less incident particles (photons, electrons, etc.) so are naturally more prone to random dose variations (sometimes called shot noise). Third, the CD vs dose model needs to be discussed much more openly especially as more critical features are being added.

double-o-nothing
User Rank
Rookie
re: E-beam: Ecosystem investment grows, but more neede
double-o-nothing   11/15/2010 1:06:47 PM
NO RATINGS
Charging is another inevitable factor that needs to be possibly captured by DFEB.

unknown multiplier
User Rank
Rookie
re: E-beam: Ecosystem investment grows, but more neede
unknown multiplier   11/15/2010 2:16:52 PM
NO RATINGS
Isn't it just one more random electron scattering factor?

August Cartoon Caption Winner!
August Cartoon Caption Winner!
"All the King's horses and all the KIng's men gave up on Humpty, so they handed the problem off to Engineering."
5 comments
Top Comments of the Week
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Times on Twitter
EE Times Twitter Feed
Flash Poll
Radio
NEXT UPCOMING BROADCAST
How to Cope with a Burpy Comet
October 17, 2pm EDT Friday
EE Times Editorial Director Karen Field interviews Andrea Accomazzo, Flight Director for the Rosetta Spacecraft.