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Delving deep into Micron and Intel’s 20-nm 64-Gbit MLC NAND flash memory

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FraAmelia
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re: Delving deep into Micron and Intel’s 20-nm 64-Gbit MLC NAND flash memory
FraAmelia   7/26/2012 7:29:39 AM
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It seems that also the FG is a sort of Hybrid FG as on top of the poly there is a dark layer autoaligned, it could be TiN. is it possible to know more about this technology solution?

phoenixdave
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re: Delving deep into Micron and Intel’s 20-nm 64-Gbit MLC NAND flash memory
phoenixdave   3/29/2012 1:35:14 PM
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Great article. Thanks for the technical details and images!

resistion
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re: Delving deep into Micron and Intel’s 20-nm 64-Gbit MLC NAND flash memory
resistion   3/27/2012 8:01:48 PM
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Looks like planarization before IGD? Why add this now?

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