Keeping technology cycles to exactly two years (and announcements to under two weeks) Intel announced their working 22 nm SRAM test chips at the Intel Developer Forum in San Francisco. In addition to the smallest SRAM cell size ever reported, several other key details were disclosed:
• SRAM cell size of 0.092 square microns
• 22 nm shuttle chips are more than just SRAM including mixed signal components like PLLs
• Continuing with 193 nm immersion, several layers of double patterning will be added to the 32 nm flow
• PMOS saturation currents continue to close the gap on NMOS
http://www.semicondr.com/Blog/Entries/2009/9/22_Intel_22nm_SRAM_Wafer_Shown_at_IDF.html