AMEC offers MOCVD tool for GaN lighting

LONDON – China's most successful chip-making equipment supplier Advanced Micro-Fabrication Equipment Inc. (Shanghai, China) has said it will introduce the Prismo D–Blue metal-organic chemical vapor deposition (MOCVD) machine at the Semicon China exhibition next week.

The tool is intended for the creation of GaN, InGaN and AlGaN layered structures used for the creation of high-brightness light emitting diodes for solid-state lighting applications. The introduction of a machine intended for high-volume production will bring AMEC into competition with such companies as Veeco and Aixtron.

The Prismo D-Blue architecture can accommodate up to four reactors, each of which can be controlled independently, and the footprint is nearly 30 percent less than competitor single-reactor systems, the company said. The tool can process up to 216 2-inch wafers simultaneously. The processing capability will extend to 4- and 6-inch wafer production. Special innovations embodied in the Prismo D-Blue platform are protected by a portfolio of more than 100 granted or pending patents, the company said.

One tool has already been shipped to a customer's LED production line in China.



Click on image to enlarge.
The Prismo D-Blue MOCVD machine from Shanghai headquartered AMEC.

The market for MOCVD tools is estimated to be worth $4.3 billion between now and 2017 and China is expected to dominate the manufacture of LED light bulbs. "The SSL [solid-state lighting] market is an essential element of our growth strategy," said Zhiyou Du, senior vice president and general manager of AMEC's MOCVD business division, in a statement.




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