LONDON Metrology equipment company Nanometrics Inc. said it has filed a complaint alleging intellectual property infringement in the United States District Court for the Northern District of California against Nova Measuring Instruments Ltd.
Nanometrics (Milpitas, Calif.) claimed Nova (Rehovoth, Israel) was infringing Nanometrics’ U.S. Patent Number Re. 34,783. The patent, “Method for Determining Absolute Reflectance of a Material in the Ultraviolet Range,” relates to Nanometrics’ ultraviolet reflectometry and optical critical dimension tools, the company said.
“Nanometrics pioneered the field of ultraviolet metrology for the semiconductor industry,” said John Heaton, president and chief executive officer of Nanometrics, in a statement.
Nanometrics has also been on the receiving end of a complaint alleging certain of its products infringed the intellectual property of KLA-Tencor Corp. The suit was filed in August 2005 and Nanometrics was granted a motion for stay in the case in March 2006.