SAN JOSE, Calif. Ricor Cryogenic & Vacuum Systems Ltd., a manufacturer of semiconductor equipment, has acquired InnerSense Ltd. for an undisclosed price.
With the deal, Ricor (En Harod, Israel) has expanded its efforts from cryogenic equipment and purging solutions to diagnostic systems. Ricor develops, manufactures and markets cryocoolers and wafer storage purge systems.
InnerSense has developed the so-called "Smart Wafer" technology, which provides the means to record the forces acting on a wafer as it is handled by wafer fabrication equipment.
''This approach delivers a significant yield boost as it provides a statistical monitoring method for abnormal mechanical events in IC manufacturing and can be used as a cornerstone of an intelligent maintenance program by routinely measuring equipment wear in a non- invasive approach,'' according to the companies.