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10 fab technologies on the hot seat

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re: 10 fab technologies on the hot seat
Diogenes53   10/18/2008 3:28:46 AM
EUV is still X-ray, as it has always been, and continues to suffer from those nagging x-ray problems which surfaced decades ago. If they havent been solved yet after billions of dollars, yen and other currencies, they are probably not economically solvable Maskless is still ebeam direct write, as it has always been and continues to suffer from the nagging EBDW which surfaced decades ago. Renaming these technologies clearly havent solved the fundamental problems. The only truly new approach is imprint which isnt really an NGL. Genuine NGLs use a non-optical source which causes all kinds of resist, mask, and yes, source, problems. Imprint uses an optical source, optical resists, and optical masks, but in a novel way. And it hasnt consumed billions of dollars or decades yet. Mark Lapedus is right: EUV and EBDW are fairy tales. Someone will get imprint right.

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