REGISTER | LOGIN
Breaking News
News & Analysis

What is source-mask optimization?

2/27/2009 05:00 AM EST
1 Comment
NO RATINGS
Page 1 / 3 Next >
More Related Links
View Comments: Newest First | Oldest First | Threaded View
resistion
User Rank
Author
Influence of noise
resistion   1/5/2016 6:51:09 PM
NO RATINGS
Source-mask optimization involves re-adjustment of point sources of light in the pupil. There could be some noise impact, especially if these are small dose components. It is even more severe for EUV.

Most Recent Comments
Ian Johns
 
David Ashton
 
David Ashton
 
RSD2
 
Ian Johns
 
paul.jhnson
 
jennray
 
dpettit
 
David Ashton

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
Like Us on Facebook
EE Times on Twitter
EE Times Twitter Feed