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TSMC/Mapper: Multiple e-beam tech to become litho standard

2/19/2010 10:00 AM EST
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mike_allan
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re: TSMC/Mapper: Multiple e-beam tech to become litho standard
mike_allan   2/21/2010 7:40:08 PM
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Actually Mapper does have a vid of the process. http://www.mapperlithography.com/technology.html

mike_allan
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re: TSMC/Mapper: Multiple e-beam tech to become litho standard
mike_allan   2/21/2010 7:35:50 PM
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While e-beams are relatively inexpensive, the task of controlling 10,000 simultaneous sources is daunting. Would love to see a animation of their process. Good luck in stepping from 110 beams to 10k.

resistion
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re: TSMC/Mapper: Multiple e-beam tech to become litho standard
resistion   2/19/2010 5:36:15 PM
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How small the features? It would have made more sense to note the exact feature size rather than make an embarrassing statement about their own immersion tools.

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