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EUV metrology R&D doesn't add up

2/24/2010 10:00 PM EST
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resistion
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re: EUV metrology R&D doesn't add up
resistion   3/12/2010 9:13:11 AM
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The situation gets worse when you consider the repair of some of these defects, once they are found, is not possible or acceptable due to the much greater sensitivity of EUV to the repair feature or damage.

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