Breaking News
News & Analysis

EUV metrology R&D doesn't add up

2/24/2010 10:00 PM EST
1 Comment
NO RATINGS
More Related Links
View Comments: Newest First | Oldest First | Threaded View
resistion
User Rank
Manager
re: EUV metrology R&D doesn't add up
resistion   3/12/2010 9:13:11 AM
NO RATINGS
The situation gets worse when you consider the repair of some of these defects, once they are found, is not possible or acceptable due to the much greater sensitivity of EUV to the repair feature or damage.

Flash Poll
Radio
LATEST ARCHIVED BROADCAST
Join our online Radio Show on Friday 11th July starting at 2:00pm Eastern, when EETimes editor of all things fun and interesting, Max Maxfield, and embedded systems expert, Jack Ganssle, will debate as to just what is, and is not, and embedded system.
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Times on Twitter
EE Times Twitter Feed
Top Comments of the Week