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EUV camp drops ball on metrology

4/5/2010 04:00 AM EDT
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KAGoldberg
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re: EUV camp drops ball on metrology
KAGoldberg   4/10/2010 2:06:16 AM
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That was only true for early tools. The AIMS system Zeiss has proposed uses direct EUV imaging, similar to the prototype SEMATECH Berkeley Actinic Inspection Tool (AIT).

resistion
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re: EUV camp drops ball on metrology
resistion   4/5/2010 1:42:37 PM
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If I recall correctly, EUV AIMS used an intermediate EUV-to-photoelectron converter, and it is the photoelectrons which are imaged. Normally (for DUV), a microscope CCD set up would suffice. It suggests purely relying on EUV optics would be too expensive.

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