SAN JOSE, Calif. -- Japan's Ushio Inc. has acquired Royal Philips Electronics' extreme ultraviolet (EUV) light source business.
Philips has transferred the EUV unit to the Japanese company's EUV unit, dubbed Xtreme Technologies GmbH. Xtreme has an existing research and development activity for EUV light sources, and has been a partner with Philips since 2008 in the development of next-generation semiconductor-based EUV light sources.
Ushio took a 50 precent equity stake in Xtreme in 2005, and in 2008 commenced joint research with Philips, which was also active with EUV light sources. In the same year, Ushio made Xtreme a 100 percent subsidiary.