AUSTIN, Tex. -- Tokyo Electron Ltd. today announced that its PR200Z polymer removal system has been chosen as the process tool of record for International Sematech's Advanced Tool Development Facility and copper-oxide frontend line.
Sematech is targeting processes for the 100-nm (0.10-micron) node with integration of a low-k dielectric material into its baseline technology. The consortium's facility also aims to extend its work on new materials to the 65-nm (0.065-micron) node, and evaluations are planned to study the extendibility of TEL's system in back-end-of-line (BEOL) processes.
"We're looking for flexibility and improved yields," said Hunter Martinez, project engineer at Sematech and tool owner. "It's important for ISMT International Sematech to have a reliable production-worthy tool that can run multiple processes and switch chemistries quickly."
The PR200Z has the ability to evaluate a variety of solvents with various low-k materials, said Tokyo-based TEL. The system is dedicated to BEOL wet cleaning applications, such as sidewall polymer removal after dry etching, photoresist stripping and post cleaning in chemical mechanical planarization (CMP), said the company.
"Sematech is working together with TEL to improve yield in our baseline copper process and provide valuable data on advanced low-k dielectrics," said Ken Monnig, associate director of interconnect at the Austin-based semiconductor consortium. "As we expand upon the suite of low-k interconnect tools installed in our ATDF and continue to move to 300-mm, we will be continuing a mutually beneficial partnership with TEL," he added.
Japan's TEL is the first semiconductor equipment vendor to move into a "supplier room" at Sematech, which has started a new strategy to make cleanroom space available to tool suppliers for development of next-generation processes (see March 18 story).
Last month, TEL also announced it was shifting itsU.S.-based R&D activities in lithography processes and integrated metrology technologies to the company's Austin operation (see April 2 story). The move is expected to help TEL strengthen its cooperation with Sematech in the future.