SAN DIEGO -- Cymer Inc. here and Germany's LTB Lasertechnik Berlin GmbH today announced plans to jointly develop advanced spectrometer systems for measuring the spectral performance of deep-ultraviolet (DUV) light sources.
"This agreement with LTB will be highly valuable in helping us meet our product roadmap," said Ted Holtaway, senior vice president of operations and business process management at Cymer in San Diego. "We expect to begin shipping light sources based on our new 'Master Oscillator Power Amplifier,' or MOPA, technology early next year."
Holtaway said advanced light sources will require very high-resolution spectral metrology tools to enable wafer fabs to receive the highest possible value for investments. LTB Lasertechnik--a developer of short-pulse lasers and laser measuring equipment--is expected to help Cymer to play a key role in setting the standard for light source performance measurement in the future, Holtaway said.
For LTB, the new partnership will enable the Berlin-based company to anticipate future requirements for new tools used in measuring advanced DUV light sources, said Matthias Scholz, managing director of LTB Lasertechnik. "In addition, utilizing Cymer's extensive supply chain will help broaden the market opportunity for our products," he added.
Terms of the joint-development partnership were not released.