ANDOVER, Mass. -- MKS Instruments Inc. today announced it won $4.2 million in damages from a federal court jury in a patent lawsuit against Advanced Energy Industries Inc. of Fort Collins, Colo.
MKS said the jury found Advanced Energy had infringed upon a patent related to devices that dissociate gases for chip-processing applications. The U.S. Patent No. 6,150,628 is used in MKS's Astron series of reactive gas generation products sold by the ASTeX Products Group in Wilmington, Mass.
The federal lawsuit, in Delaware, was originally brought against Advanced Energy by Applied Science Technology Inc. (ASTeX) in November 2000. MKS acquired Applied Science and Technology in 2001 (see Oct. 2, 2001, story).
A response from Advanced Energy was not immediately available today.