LIVERMORE, Calif. -- Torrex Inc. here entered the emerging atomic layer deposition (ALD) market, announcing that it has begun shipping its first tool for sub-100-nm chip designs.
The FlexStar is the industry's first mini-batch ALD system. Its patented parallel wafer processing technology combines the benefits of single wafer and batch processing in a mini-batch configuration, according to the Livermore-based company.
The FlexStar is ideal for both R&D and production environments. Capable of processing 1 to 25 wafers at a time, the system offers "best-of-breed" film quality and low thermal budgets. It offers a wide range of front-end ALD applications for advanced sub-100nm devices, Ajit Paranjpe, vice president of technology for the company.
Torrex itself is a supplier of ALD system as well as low-pressure chemical vapor deposition (LPCVD) for the semiconductor industry.