TOKYO -- Tokyo Electron Ltd. (TEL), a supplier of semiconductor and flat panel display manufacturing equipment, has introduced an optical critical dimension (OCD) measurement module for use with coater/developers.
The module is based on an optical digital profile measurement unit developed by Timbre Technologies Inc., a U.S. subsidiary of TEL. This measurement unit outputs critical dimensions by performing computations on spectral changes in reflected light, the company said.
TEL said it has combined the Timbre unit with a spectroscopic reflectometer from another manufacturer of measurement instruments, and released it as an OCD module for use in processing systems. By building the module into coater/developers, critical dimensions can be monitored in real time, the company claimed.
TEL did not give a price for the optical critical dimension measurement module,which is scheduled to start shipping to customers in March 2003 for use with TEL's Clean-Track ACT series of coater/developers.