MINNEAPOLIS--FSI International Inc. here today said a federal judge has dismissed all patent claims filed by CFM Technologies Inc. against YieldUp International Inc., which is now a subsidiary of FSI.
CFM Technologies--which is now a part of Mattson Technology Inc.--had sued YieldUp in 1998 as part of its efforts to enforce patents for wet-wafer cleaning technologies. A year ago, CFM of Exton, Pa., lost a decision by U.S. District Judge Roderick R. McKelvie in Delaware, who ruled that the company's patents were invalid for lack of "enablement" (see April 2, 2000, story).
FSI today said the judge ruled this week that CFM's inventors engaged in "inequitable conduct during the prosecution of the patent application, which led to the issuance of these patents." As a result of the recent ruling and last year's judgment, FSI said all patent claims have been dismissed against YieldUp, which is now known the SCD operation in Mountain View, Calif. FSI acquired YieldUp in 1999 to create its Surface Conditioning Division (see Oct. 21, 1999, story).
An immediate response to the ruling was not available form Mattson, which acquired CFM at the start of this year to expand in wet-bench cleaning systems (see Jan. 3 story).