SAN DIEGO -- JMAR Technologies Inc. here today announced that it has received funding from the U.S. Army to continue the development of its X-ray lithography program.
The San Diego-based company received a total of $7,796,259 from the U.S. Army Robert Morris Acquisition Center in Adelphi, Md. The contract is sponsored by the Defense Advanced Research Projects Agency (DARPA).
The funds will be used to construct an engineering prototype, or "beta" system, of an integrated X-ray lithography system, based on the technology from Semiconductor Advanced Lithography Inc. (SAL) of South Burlington, Vt.
In April, JMAR jumped into the lithography-tool business by acquiring SAL, a supplier of X-ray stepper systems (see April 17 story ).
The X-ray stepper will be designed for use in processing chips for optical networking, wireless, and military applications, said John S. Martinez, JMAR's chairman and CEO.
"The timely availability of these additional funds will accelerate our efforts to complete, in 2002, a fully integrated engineering prototype X-ray lithography system capable of handling the first of what we believe will ultimately become a wide-range of high-performance semiconductor manufacturing applications," he said.
"Specifically, this added financing will enable us to complete several key incrementally-funded contract tasks that were initially awarded to JMAR over the past three years," Martinez said.
"Before the end of 2001, we expect DARPA will award a separate new contract to JMAR to complete the purchase of a Model 5 stepper from SAL, install JMAR's X-ray source into the stepper and perform the final installation and checkout of the fully-integrated system," he said.