SOEUL -- Korea's Samsung Electronics Co. Ltd. here has become the first company to install and deploy Cymer Inc.'s new e-diagnostics software tools used in its excimer-laser equipment.
Cymer claims that Samsung has installed its so-called CymerOnLine software. Launched last quarter, CymerOnLine provides e-diagnostics and performance monitoring for remote analysis and support of its excimer light sources.
The software package is being used to monitor Cymer's light sources installed within Samsung's fabs. In addition, CymerOnLine is currently installed at several beta test sites within other chip makers as well.
Brian Klene, Cymer's senior vice president of marketing and business development, said CymerOnLine is designed to boost the productivity for chip makers.
"With the cost of constructing new fabs approaching $2 billion, chipmakers are looking for more innovative ways to maximizefab efficiency and thereby achieve a higher return on their investment," Klene said.
"The benefits afforded by CymerOnLine result in an increased productivity and efficiency of our light sources, as well as a significant reduction in fab costs," he added.