FLANDERS, N.J.--Metrology suppliers Rudolph Technologies Inc. here and Therma-Wave Inc. in Fremont, Calif., today announced a settlement to their patent dispute with "no financial consideration" paid by either party.
As a condition of the settlement, Therma-Wave filed a concession of priority in the patent interference case based upon a review of evidence presented by Rudolph. In exchange, Rudolph said it has agreed not to assert its patent against Therma-Wave's products.
Other terms of the settlement were not released.
"We are pleased to finally get this issue resolved and behind us," said Paul F. McLaughlin, chairman and CEO of Rudolph Technologies. "We can now focus additional resources on the more important issues at hand--specifically, continuing our developments of advanced metrology systems during this portion of the economic cycle so that Rudolph is a required technology purchase for the pending industry upturn."