SANTA CLARA, Calif. --BOC Edwards today said it was expanding its technology center here with a new chemical management applications laboratory that will be focused on copper processes and slurries for chemical mechanical planarization (CMP).
"Numerous new product developments are underway which will lead us to offer our customers the most complete, robust chemical integrated subsystems in the industry today," said Nigel Hunton, president of BOC Edwards' Chemical Management Division. "Customers can troubleshoot problems, evaluate equipment performance and test new slurries at this facility."
The BOC Group division increased its offerings for chip-processing plants when it acquired the chemical management business of FSI International Inc. for about $38 million last year (see Jan 9, 1999, story). BOC Edwards said its new Silicon Valley lab will be equipped to test components and evaluate the performance of equipment, including software and metrology. The lab will also perform ongoing tests and evaluations on slurries for oxide, tungsten, copper, and polysilicon processes.
The lab is scheduled to officially open on March 2.