WILMINGTON, Mass. -- BOC Edwards and Millipore Corp. today announced that the two companies have formed an alliance to develop and market an integrated bath regeneration system for copper electrochemical deposition (ECD) applications in the semiconductor industry.
Utilizing organic by-product removal and chemistry purification technologies developed by Millipore, BOC Edwards will design and manufacture a new system called CuBIS (Copper Bath Integrated Solution). The two companies will work with manufacturers of copper plating tools to develop a process that will lower the cost of ownership of ECD tools by a combination of reduced chemical consumption and reduced waste generation. End user validation is expected to take place by the third quarter.
"We are continually looking for innovative solutions to add value for our customers," said Raj Rajagopol, CEO of BOC Edwards. "This system will answer tomorrow's copper bath management challenges, and offer the end-users with a unique integrated platform for their copper electrochemical deposition process."
"This is an opportunity for Millipore to use our expertise in purification to provide advanced process technology in copper bath regeneration," said Jean-Marc Pandraud, vice president and general manager of Millipore's Microelectronics Divisions.