DANBURY, Connecticut "- Materials supplier ATMI Inc. announced the acquisition of ESC Inc., a producer of surface preparation and cleaning materials for copper interconnect based in Bethlehem, Pennsylvania, on Monday (July 14, 2003). On the previous Friday said that a subsidiary company, Advanced Technology Materials Inc., had filed suit against Praxair Inc., alleging willful infringement of two patents ATMI holds for sub-atmospheric pressure gas delivery.
"ATMI has been investing heavily in copper and advanced interconnect materials. A key step in advanced interconnect processing is surface preparation and cleaning, especially post CMP chemical mechanical planarization processing. ESC has a series of patent-protected products that provide the unique wafer cleaning capabilities that copper processing requires. We believe this acquisition will provide ATMI with a capability that amplifies our presence in both copper materials and CMP," said Gene Banucci, ATMI chief executive officer, in a statement on the ESC acquisition.
Financial terms of the acquisition were not disclosed.
Regarding the suit against Praxair Oliver Zitzmann, ATMI chief legal officer, said: "The suit, which was filed in the United States District Court for the Southern District of New of York alleges that Praxair has infringed, and is actively inducing others to infringe ATMI's United States Patent Nos. 6,101,816 and 6,343,476, related to our VAC Vacuum-Actuated Cylinder product. ATMI is seeking treble damages and an injunction."