Billerica, MA--November 19, 1996--PRI Automation Inc. (Billerica, MA) announced that it has received a $4.5-million order from Mitsubishi Silicon America Corp. (formerly Siltec Corp.). Mitsubishi, a producer of silicon wafers used by semiconductor manufacturers, has purchased from PRI an Automated Materials Handling System (AMHS) for its Mod V fab in Salem, OR. This is PRI's second order from Mitsubishi in the past 18 months.
The AMHS will include stockers, an AeroTrak overhead monorail system, Machine Loading Robot Vehicles (MLRVs), and Loading Robots (LRs) for both interbay and intrabay transport and storage of 150 mm and 200 mm silicon wafers. PRI expects to install the system in early 1997.
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