San Jose, CA--January 22, 1997--GaSonics International (San Jose, CA) announced that it has received orders totaling more than $10 million from multiple global semiconductor manufacturers in Asia and the U.S.
The orders include GaSonics' Performance Enhancement Platform (PEP) 3510A cluster system with dual photoresist removal modules, PEP 3510C system with photoresist removal and cleaning modules, and VHP high-pressure thermal processing system. GaSonics reports that the PEP systems will be used to manufacture dynamic random access memories (DRAMs) with 0.25m design rules.
The VHP systems will be used to extend LOCOS isolation technology for 64-Mbit DRAMs and low-temperature steam oxidation in the manufacture of high-performance devices with 0.25m features.
In a related announcement, GaSonics reports that the PEP 3510C system has been production qualified by two major semiconductor manufacturers for clean and photoresist removal applications at 0.25m. The specific post-etch cleaning processes receiving qualification were post-poly and post-metal etch residue removal. GaSonics now offers multiple production-proven solutions for devices with 0.25m design rules, including the advanced VHP system.
GaSonics' PEP offers cleaning capabilities, including the removal of post-etch residues and high-throughput downstream microwave photoresist removal, while delivering maximum utilization. The PEP platform also provides process flexibility by accommodating sequential, parallel, or independent processing.
The VHP system, which is based on GaSonics' high-pressure oxidation technology, extends LOCOS isolation and oxidation for 0.25m and below geometries. Because VHP LOCOS requires fewer processing steps and mask layers than shallow trench isolation, the VHP system provides up to a 50-percent reduction in cost of ownership. Capable of steam or dry oxidation processing for film thicknesses from 40 angstroms to several microns, the VHP system offers shorter cycle times and a lower thermal budget than conventional atmospheric furnaces on the market today.
2540 Junction Ave.
San Jose, CA 95134
Fax: (408) 325-6640
Return to Headlines