Milpitas, CA--February 25, 1997--Tencor Instruments (Milpitas, CA) introduced the Tencor Laser ADC module, a new option for its line of Tencor CRS Laser Confocal Review Stations. Tencor now offers a laser confocal ADC technology that successfully addresses high-level, back-end processes, such as after-metal etch and post-chemical-mechanical planarization (CMP). The Laser ADC is available immediately as an upgrade to Tencor CRS systems and CRS systems configured with the white light ADC module.
The new Laser ADC software package fully automates the process of defect redetection and classification on second level metal and beyond, eliminating classification errors due to operator subjectivity. In addition, it can accept defect file formats from all major inspection systems, providing consistent classification results independent of inspection tools.
The Laser ADC can export classification data directly to any defect data management system. If the Laser ADC is integrated with the Tencor SwiftAccess defect data management system, engineers inside and outside the fab can be notified automatically via an alarm monitor if a defect type exceeds acceptable control limits, reducing the time to take corrective action.
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