Chandler, AZ--March 26, 1997--SpeedFam International Inc. (Chandler, AZ) announced the first order for its Auriga system from National Semiconductor Corp. (Santa Clara, CA). The order is valued in excess of $2 million and is scheduled for shipment this month.
Auriga is SpeedFam's next-generation product for the planarization of advanced semiconductor devices. In addition to National Semiconductor, Auriga customers to date include Siemens Microelectronics Center; United Integrated Circuits Corp.; Promos Technology Inc.; and Cirent Semiconductor.
Within the five-head, two-table architecture designed initially for the CMP-V, Auriga features an integrated multiple-process control system which allows multi-tasking of tool automation and control. This multi-tasking increases throughput, resulting in lower cost of ownership as measured per wafer per pass through the system.
National Semiconductor plans to use its first Auriga system to support advanced CMP process development for oxide and metal applications at the company's Advanced Technology Group Fab.
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