Chandler, AZ--May 28, 1997--SpeedFam International Inc. (Chandler, AZ), a supplier of high-throughput chemical mechanical polishing (CMP) systems for the semiconductor and disk media industries, announced a $4.7-million, follow-on order for multiple Auriga systems from Siemens Semiconductor Group (Paris, France).
The order, which follows Siemens' initial purchase of Auriga last fall, is scheduled for shipment beginning next month to the Siemens Microelectronics Centre GmbH & Co. oHG fab located in Dresden, Germany and the Siemens Microelectronics Ltd. fab in Newcastle, England. These systems will be used initially for oxide planarization. The Newcastle order is a result of the first successful implementation at the Dresden fab.
In addition to Siemens Semiconductor Group, Auriga customers include Promos Technology Inc., a joint venture between Siemens Semiconductor Group and Mosel Vitelic Inc.; United Integrated Circuits Corp. in Taiwan; Cirent Semiconductor, a joint venture between Lucent Technologies Microelectronics Group and Cirrus Logic Inc.; National Semiconductor Corp.; and other integrated circuit manufacturers.
Auriga is SpeedFam's next-generation product for the planarization of advanced semiconductor devices. Throughput for the Auriga system in production CMP environments can reach 75-100 wafers per hour in continuous feed operation.
Within the five-head, two-table architecture designed initially for the CMP-V, Auriga features an integrated multiple-process control system which allows multi-tasking of tool automation and control. This multi-tasking increases throughput, resulting in lower cost of ownership as measured per wafer per pass through the system.
Return to Headlines