San Jose--July 23, 1997--GaSonics International Corp. (San Jose) announced that White Oak Semiconductor (Richmond, Va.), the joint venture between Siemens Semiconductor Group and Motorola Semiconductor Products Sector, has selected GaSonics as a supplier of photoresist removal systems for its new Richmond fab.
GaSonics will supply the White Oak facility with Performance Enhancement Platform (PEP) systems.
The PEP platform offers a number of advantages in high-volume production, including process flexibility, high throughput, and enhanced productivity. PEP's dual chamber configuration accommodates interchangeable photoresist removal and cleaning chambers for maximum utilization. Process flexibility is achieved with the platform's sequential, parallel, and independent processing capability as well as both in-situ resist removal/clean and dedicated clean or isotropic etch. To further PEP's productivity advantage, GaSonics recently made available the PEP Package Solution, which improves utilization and OEE through a number of software and diagnostic improvements and the addition of a six-cassette buffer station, the Queue.
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