San Jose--Sept. 23, 1997--Ultratech Stepper Inc. (San Jose) announced the Model 1800--a lithography tool designed to provide a low cost-of-ownership solution for magneto-resistive (MR) and giant magneto-resistive (GMR) rowbar-level pole trimming requirements of TFH manufacturers.
The Model 1800 represents the latest milestone in Ultratech's ongoing charter to address this industry's need for application-specific lithography tools.
According to a May 1997 study published by the market analysis firm TrendFOCUS, the MR/GMR market will grow from over 452 million units in 1997 to approximately 1,377 million units by the year 2000, equating to a compound annual growth rate (CAGR) of over 45 percent. Based on Ultratech's production-proven Model 1700 MVS system, the Model 1800 is designed to provide first order alignment to the MR lead layer while maintaining the resolution and throughput requirements for advanced TFH rowbar production.
The Model 1800 features a 28 by 2.0 mm field size, with 0.8 m resolution capabilities and 150 nm, 3 sigma alignment. The system's new machine vision system (MVS) features dual camera illumination and a minimum camera spacing of 8.0 mm, providing increased alignment accuracy and improving throughput by utilizing a direct alignment approach.
In addition, innovative focus probes combined with site-by-site focusing and tilt correction capability contribute to superior critical dimension (CD) control. The system's customized software includes four-level password protection, networking capability, full screen graphical wafer maps, reticle rotation correction, focus probe, flow verification and gap search, and auto-convolution algorithms for industry-leading alignment performance.
The system will be available for volume production shipment in the fourth fiscal quarter of this year. For more information about the Model 1800 and the company's other TFH tools, visit Ultratech at booth No. 1920 during DISKCON '97, Sept. 23-26 at the San Jose Convention Center.
San Jose, CA
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