Palo Alto, Calif.-- Oct. 28, 1997--The LONMARKInteroperability Association announced the formation of a Semiconductor Task group to develop standard device profiles for semiconductor tool applications.
Leading semiconductor tool and device manufacturers in the United States, Europe, and Japan, including Lam Research, Edwards High Vacuum, HermosInformatik, Kokusai Electric, Ebara, and Nippon Motorola, are working together in the LONMARK Semiconductor Task group.
The use of LONWORKS networks in semiconductor manufacturing is widespread. Hundreds of cluster tools for wafer deposition and etching have already shipped with LONWORKS-based components. The formation of the LONMARK Semiconductor Task Group allows semiconductor tool and device manufacturers to work together to develop LONWORKS products conforming with the LONMARK standard for interoperability. LONMARK compliant products enable easy integrationof multivendor control systems without the need for custom hardware or software development.
LONMARK Interoperability Association
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