San Jose, Calif.-- Oct. 24, 1997--Ultratech Stepper Inc., a leading supplier of photolithography systems used for the manufacture of semiconductors, thin film heads (TFHs) for disk drives, and micromachining devices, introduced the newest addition to its production-proven Model 1500 Lithography Series-the Model 1500MVS.
Building upon the cost and performance benefits of its well established 1500 platform, the Model 1500MVS offers the added advantage of Ultratech's machine vision system (MVS), which delivers alignment flexibility unattainable with standard alignment techniques.
As a pattern recognition alignment system, MVS eliminates the need for larger scribe lines between each die to hold dedicated alignment targets. The result is an increase in net die-per-wafer.
Ultratech reports that the Model 1500's MVS capability allows it to identify targets produced for any other lithography tool, circumventing the need for dedicated targets and accelerating mix-and-match implementation.
With this added flexibility and performance, Ultratech believes that the Model 1500MVS may open up new market opportunities-especially in the Asian region-while expanding the existing U.S. customer base as manufacturers add loose lithography-layer capacity.
Company officials report that low-cost, high-volume chip makers, inparticular, are responding favorably to the new system, based on its potential to replace older generation scanning projection lithographytools, as well as support a wide range of lithography applications, including application specific integrated circuits (ASICs) and logic devices.
The Model 1500MVS has features and options that enable resolutiondown to 0.8 (m. It also offers 175-nm, 3 sigma alignment and a 2.0-(m depth of focus (DOF). When coupled with the tool's high throughput of 80 wafers per hour (wph) and low system cost, these features provide chip makers with essential cost and productivity advantages. In addition, the Model 1500MVS uses a bright field alignment system, which provides robust alignment process for grainy layers such as metals.
The Model 1500MVS will be available in the fourth fiscal quarter of this year. Contact Ultratech for pricing.
in the company's SEC reports. The company assumes no obligationto update the information in this release.
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