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Lam Research Corporation Releases STI Process For High-Density PolyEtch Tool; New Process Significantly Expands Lam'S 0.35-(m AndBelow Device Markets

Lam Research Corporation Releases STI Process For High-Density PolyEtch Tool; New Process Significantly Expands Lam'S 0.35-(m AndBelow Device Markets
11/26/1997 08:00 PM EST
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