LONDON Micronic Laser Systems AB (Stockholm, Sweden) and ASML Netherlands B.V. have terminated their long-standing license agreement that gives the Dutch lithography gear maker the right to market optical maskless lithography for semiconductor applications based on Micronic's patents.
Micronic's end of the licensing deal, that gives it access to ASML's Spatial Light Modulator (SLM) and data path technology for photomask applications will continue, and as part of the arrangement, Micronic is re-paying ASML Euros 13 million that were advance on royalties.
All rights to the technology now pass back solely to Micronic.
Micronic focuses on laser pattern generators for the production of photomasks.
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