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EUV litho keeps progressing, keeps slipping

6/9/2010 11:00 PM EDT
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resistion
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re: EUV litho keeps progressing, keeps slipping
resistion   6/10/2010 7:09:08 AM
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As with any new technology, later entry points mean much tighter specs, which increase the entry barrier. The incumbent technology is therefore stretched further. Sub-20-nm has to happen anyway.

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