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EUV litho sources improving, says workshop

6/29/2010 02:53 PM EDT
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pixies
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re: EUV litho sources improving, says workshop
pixies   6/29/2010 8:03:44 PM
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Intensity and throughput is only one of several show-stoppers. The light source can only continuously operate for few hours! It is amazing how many litho experts religiously believe that EUV will never enter volume production yet it still plodding ahead relentlessly, sinking all the funding the litho R&D along with it.

resistion
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re: EUV litho sources improving, says workshop
resistion   6/29/2010 12:54:25 PM
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Interesting stuff, but if they're thinking of changing the wavelength, 13.5 nm must be running out of opportunity. Still, the lower wavelength only makes the phase error of the same defect more severe.

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