SAN JOSE, Calif. - GlobalFoundries Inc. is making a big push in the MEMS foundry business.
The Institute of Microelectronics (IME), a research institute of the Agency for Science, Technology and Research (A*STAR) in Singapore, and GlobalFoundries are teaming up to develop a MEMS-based capacitive sensor platform technology.
Under the agreement, silicon foundry vendor GlobalFoundries will be responsible for preliminary platform design specifications and process flow. IME will concentrate its effort in developing a modular and scalable capacitive sensor technology platform with standardized process modules and process integration scheme based on IME’s advanced MEMS fabrication facilities and tools.
IME’s multi-wafers bonding technology will be a key enabler for this joint project.
GlobalFoundries' MEMS roots can be traced backed to Singapore's Chartered Semiconductor Manufacturing Pte., a foundry vendor that was acquired by Abu Dhabi's Advanced Technology Investment Co. (ATIC) last year. ATIC and Advanced Micro Devices Inc. are the investors in GlobalFoundries.
In 1997, Chartered demonstrated a MEMS capability by moving into production with an inkjet head line. Last year, Chartered joined a MEMS consortium in Singapore, dubbed the MEMS Consortium @ IME Singapore.