LONDON – Foundry chipmaker United Microelectronics Corp. has started producing microelectromechanical systems (MEMS) sensor products for customers and has volume production scheduled for later this year. The achievement follows three years of MEMS technology development. UMC said.
One product is a microphone made using UMC's CMOS-MEMS manufacturing process technology. The microphone has been verified and has specifications of above 56dBA for signal-to-noise (S/N) ratio. Engineering samples are scheduled for the first half of this year, with volume production to begin thereafter. Development of a CMOS-MEMS accelerometer has also met consumer electronics application specifications of measuring 1 to 16g and achieved readiness for volume production.
"Our success with MEMS, a challenging technology, underscores UMC's commitment to offer customers a full range of innovative, high-performance, and compact solutions," said Anchor Chen, senior director of special technology development at UMC.
Demand for CMOS-MEMS foundry services is set to rise rapidly said UMC and it plans to make CMOS-MEMS technology available to industry and academia for new component development.
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