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Multi-photon photoresists said to beat UV

2/8/2011 11:09 PM EST
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vijayamalli
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re: Multi-photon photoresists said to beat UV
vijayamalli   2/15/2011 9:03:14 PM
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thank you Colin, very informative video, now it is clear how that works...good luck to John Fourkas!

pixies
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re: Multi-photon photoresists said to beat UV
pixies   2/11/2011 6:40:24 PM
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There is a company called LumArray out of MIT has been trying to apply similar type of technology to their maskless litho systems for almost 10 years. And is selling working systems now. Prof. Fourkas' approach requires two high a light intensity it will be difficult to achieve high throughput. In addition, a similar SEM picture has been posted outside Prof. Fourkas' lab at UMD for about 10 years, how come it has just mad news?

resistion
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re: Multi-photon photoresists said to beat UV
resistion   2/10/2011 7:15:14 AM
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Two-photon doesn't provide any density improvement over double exposure. In fact, it still relies on double exposure.

resistion
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re: Multi-photon photoresists said to beat UV
resistion   2/10/2011 7:08:49 AM
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Well apparently it is sensitive to blue light (400 nm). Yellow light may not be as safe as for UV resists.

R_Colin_Johnson
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re: Multi-photon photoresists said to beat UV
R_Colin_Johnson   2/9/2011 5:36:37 PM
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OK, it turns out that the yellow cleanroom light will not expose this special photoresist. Here is what professor Fourkas says: "We do everything under yellow cleanroom lights, so it's not highly sensitive to it. We tend to prepare resists fresh and use them within a day or so, and so it's possible that there could be a longer-term effect if they aren't stored in the dark (like any other photoresist....)"

R_Colin_Johnson
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re: Multi-photon photoresists said to beat UV
R_Colin_Johnson   2/9/2011 5:18:29 PM
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The chemical formulas of the photoresists can be viewed here: http://bit.ly/dRCq94

R_Colin_Johnson
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re: Multi-photon photoresists said to beat UV
R_Colin_Johnson   2/9/2011 5:17:21 PM
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I believe so , but not sure. Checking on this.

krisi
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re: Multi-photon photoresists said to beat UV
krisi   2/9/2011 5:15:13 PM
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thank you Colin, very informative video, now it is clear how that works...good luck to John Fourkas!

krisi
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re: Multi-photon photoresists said to beat UV
krisi   2/9/2011 5:14:41 PM
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thank you Colin, very informative video, no it is clear how that works...good luck to John Fourkas!

R_Colin_Johnson
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re: Multi-photon photoresists said to beat UV
R_Colin_Johnson   2/9/2011 5:11:07 PM
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It took a few reads to get it too. Check out the video I reference below, also there is supplemental information in a PDF at: http://bit.ly/hhxBF9

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