Breaking News
News & Analysis

Multi-photon photoresists said to beat UV

2/8/2011 11:09 PM EST
16 comments
NO RATINGS
More Related Links
View Comments: Newest First | Oldest First | Threaded View
Page 1 / 2   >   >>
vijayamalli
User Rank
Rookie
re: Multi-photon photoresists said to beat UV
vijayamalli   2/15/2011 9:03:14 PM
NO RATINGS
thank you Colin, very informative video, now it is clear how that works...good luck to John Fourkas!

pixies
User Rank
Rookie
re: Multi-photon photoresists said to beat UV
pixies   2/11/2011 6:40:24 PM
NO RATINGS
There is a company called LumArray out of MIT has been trying to apply similar type of technology to their maskless litho systems for almost 10 years. And is selling working systems now. Prof. Fourkas' approach requires two high a light intensity it will be difficult to achieve high throughput. In addition, a similar SEM picture has been posted outside Prof. Fourkas' lab at UMD for about 10 years, how come it has just mad news?

resistion
User Rank
CEO
re: Multi-photon photoresists said to beat UV
resistion   2/10/2011 7:15:14 AM
NO RATINGS
Two-photon doesn't provide any density improvement over double exposure. In fact, it still relies on double exposure.

resistion
User Rank
CEO
re: Multi-photon photoresists said to beat UV
resistion   2/10/2011 7:08:49 AM
NO RATINGS
Well apparently it is sensitive to blue light (400 nm). Yellow light may not be as safe as for UV resists.

R_Colin_Johnson
User Rank
Blogger
re: Multi-photon photoresists said to beat UV
R_Colin_Johnson   2/9/2011 5:36:37 PM
NO RATINGS
OK, it turns out that the yellow cleanroom light will not expose this special photoresist. Here is what professor Fourkas says: "We do everything under yellow cleanroom lights, so it's not highly sensitive to it. We tend to prepare resists fresh and use them within a day or so, and so it's possible that there could be a longer-term effect if they aren't stored in the dark (like any other photoresist....)"

R_Colin_Johnson
User Rank
Blogger
re: Multi-photon photoresists said to beat UV
R_Colin_Johnson   2/9/2011 5:18:29 PM
NO RATINGS
The chemical formulas of the photoresists can be viewed here: http://bit.ly/dRCq94

R_Colin_Johnson
User Rank
Blogger
re: Multi-photon photoresists said to beat UV
R_Colin_Johnson   2/9/2011 5:17:21 PM
NO RATINGS
I believe so , but not sure. Checking on this.

krisi
User Rank
CEO
re: Multi-photon photoresists said to beat UV
krisi   2/9/2011 5:15:13 PM
NO RATINGS
thank you Colin, very informative video, now it is clear how that works...good luck to John Fourkas!

krisi
User Rank
CEO
re: Multi-photon photoresists said to beat UV
krisi   2/9/2011 5:14:41 PM
NO RATINGS
thank you Colin, very informative video, no it is clear how that works...good luck to John Fourkas!

R_Colin_Johnson
User Rank
Blogger
re: Multi-photon photoresists said to beat UV
R_Colin_Johnson   2/9/2011 5:11:07 PM
NO RATINGS
It took a few reads to get it too. Check out the video I reference below, also there is supplemental information in a PDF at: http://bit.ly/hhxBF9

Page 1 / 2   >   >>
Most Recent Comments
August Cartoon Caption Winner!
August Cartoon Caption Winner!
"All the King's horses and all the KIng's men gave up on Humpty, so they handed the problem off to Engineering."
5 comments
Top Comments of the Week
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Times on Twitter
EE Times Twitter Feed
Flash Poll
Radio
LATEST ARCHIVED BROADCAST
David Patterson, known for his pioneering research that led to RAID, clusters and more, is part of a team at UC Berkeley that recently made its RISC-V processor architecture an open source hardware offering. We talk with Patterson and one of his colleagues behind the effort about the opportunities they see, what new kinds of designs they hope to enable and what it means for today’s commercial processor giants such as Intel, ARM and Imagination Technologies.