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Industry mulls 6.7-nm wavelength EUV

2/28/2011 06:37 AM EST
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double-o-nothing
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re: Industry mulls 6.7-nm wavelength EUV
double-o-nothing   3/26/2011 1:47:27 PM
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Since 13.5 nm running out of steam at 1x nm, ASML is seriously evaluating 6.7 nm.

resistion
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re: Industry mulls 6.7-nm wavelength EUV
resistion   3/8/2011 3:24:49 AM
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I think they would consider 6.7 if the NA @ 13.5 nm does not have any practical room left. But it's an 185 eV photon instead of 92 eV, and 92 eV is already too high.

Baolt
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re: Industry mulls 6.7-nm wavelength EUV
Baolt   2/28/2011 8:32:48 PM
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So, long waited respond of Nikon at EUV is 6.7, thats good however where they stand at this moment. Still lots of rumors related to bad luck of nikon at EUV. Also any information about applied's plans for EUV?

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