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IMEC installs pre-production EUV litho

2/28/2011 07:40 AM EST
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Laguzan
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re: IMEC installs pre-production EUV litho
Laguzan   3/1/2011 2:52:31 PM
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All things are relative in terms of the economics, take a look at Samsung presentation at the Prague EUV Conference from 2009, (yes 2009!) The cost structures around dual patterning are compared to EUV,

any1
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re: IMEC installs pre-production EUV litho
any1   2/28/2011 6:44:20 PM
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It's just hard for me to imagine how EUV lithography is going to make economic sense any time soon.

resistion
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re: IMEC installs pre-production EUV litho
resistion   2/28/2011 2:39:24 PM
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Looks like TPT still not enough for the doses that are needed.

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