Breaking News
News & Analysis

IMEC installs pre-production EUV litho

2/28/2011 07:40 AM EST
5 comments
NO RATINGS
More Related Links
View Comments: Newest First | Oldest First | Threaded View
Laguzan
User Rank
Rookie
re: IMEC installs pre-production EUV litho
Laguzan   3/1/2011 2:52:31 PM
NO RATINGS
All things are relative in terms of the economics, take a look at Samsung presentation at the Prague EUV Conference from 2009, (yes 2009!) The cost structures around dual patterning are compared to EUV,

any1
User Rank
CEO
re: IMEC installs pre-production EUV litho
any1   2/28/2011 6:44:20 PM
NO RATINGS
It's just hard for me to imagine how EUV lithography is going to make economic sense any time soon.

resistion
User Rank
CEO
re: IMEC installs pre-production EUV litho
resistion   2/28/2011 2:39:24 PM
NO RATINGS
Looks like TPT still not enough for the doses that are needed.

Most Recent Comments
Wnderer
 
David Ashton
 
mikehibbett
 
dwhess
 
David Ashton
 
LarryM99
 
David Ashton
 
mikehibbett
 
goafrit
Radio
NEXT UPCOMING BROADCAST
How to Cope with a Burpy Comet
October 17, 2pm EDT Friday
EE Times Editorial Director Karen Field interviews Andrea Accomazzo, Flight Director for the Rosetta Spacecraft.
August Cartoon Caption Winner!
August Cartoon Caption Winner!
"All the King's horses and all the KIng's men gave up on Humpty, so they handed the problem off to Engineering."
5 comments
Top Comments of the Week
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Times on Twitter
EE Times Twitter Feed