Embedded Systems Conference
Breaking News
News & Analysis

Imprint litho makes a good impression

3/3/2011 00:50 AM EST
5 comments
NO RATINGS
More Related Links
View Comments: Newest First | Oldest First | Threaded View
BobbieSmith
User Rank
Author
re: Imprint litho makes a good impression
BobbieSmith   3/4/2011 5:40:06 PM
NO RATINGS
Tools that can inspect templates down to 24nm exist today. Yes, they are slow and based on ebeam, but they work. Unlike EUV where we have pinned all our hopes on a currently fictitious 100W xray source.

resistion
User Rank
Author
re: Imprint litho makes a good impression
resistion   3/4/2011 4:44:58 PM
NO RATINGS
No one has brought up the issue of template inspection.

Diogenes53
User Rank
Author
re: Imprint litho makes a good impression
Diogenes53   3/4/2011 4:22:49 PM
NO RATINGS
Molecular Imprints produces both large area and step and repeat tools. There is no such thing as "full wafer imprint" for semiconductor applications because of registration. MI has the only semiconductor imprint tool and has also sold numerous large area imprint tools to disk drive produces for bit patterned media.

double-o-nothing
User Rank
Author
re: Imprint litho makes a good impression
double-o-nothing   3/4/2011 3:36:57 AM
NO RATINGS
They are totally different. Obducat is full-wafer imprint, MII is step-and-imprint.

resistion
User Rank
Author
re: Imprint litho makes a good impression
resistion   3/3/2011 2:08:33 AM
NO RATINGS
Obducat is also popular for imprint. Are the technologies for Obducat and MII compatible for defining standards?

Flash Poll
April 2015 Cartoon Caption Contest: The Mighty Hamster
April 2015 Cartoon Caption Contest: The Mighty Hamster
Of all the exhibits in the Pre-Apocalypse Era Museum, Breek was always in awe of the unearthed details and true-to-scale reproduction of a technological creation space that the long gone humans had once inhabited.
150 comments
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Times on Twitter
EE Times Twitter Feed