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Baolab MEMS-in-CMOS heads for the compass market

7/4/2011 10:57 PM EDT
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docdivakar
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re: Baolab MEMS-in-CMOS heads for the compass market
docdivakar   7/26/2011 12:08:37 AM
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@iniewski: ditto questions... and more! I like the back-end-of-line (BEOL) based process, has promises for mixing technologies. How ever, they also remove ILD's and with the accuracy of backend processes (typically several micron's), I think the sacrificial / keep out areas may be higher than those of a front-end based CMOS MEMS process. But they also claim their main characteristic of Baolabs devices is that they are small -I would need to understand more about their process details to agree with that! MP Divakar

krisi
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re: Baolab MEMS-in-CMOS heads for the compass market
krisi   7/6/2011 11:53:46 PM
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If this works the cost advantage could be huge...has anyone seen any samples or demos that the technology works? Kris

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