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IMEC exposes wafers on preproduction EUV tool

7/11/2011 02:59 PM EDT
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OtisTD
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re: IMEC exposes wafers on preproduction EUV tool
OtisTD   7/12/2011 1:08:51 PM
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My understanding is that the ADT gets roughly 0.5 wafers per hour. So, 20x is roughly correct.

ilmenauer
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re: IMEC exposes wafers on preproduction EUV tool
ilmenauer   7/11/2011 11:54:40 PM
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So it means ADT is below wafer per hour? Or 20 times improvement is not true?

resistion
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re: IMEC exposes wafers on preproduction EUV tool
resistion   7/11/2011 10:47:05 PM
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The source produces many wavelengths, including 193 nm, but 13.5 nm is preferentially filtered.

green_ee
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re: IMEC exposes wafers on preproduction EUV tool
green_ee   7/11/2011 7:15:37 PM
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But is it still a 193nm source, or did they find a shorter wavelength ???

resistion
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re: IMEC exposes wafers on preproduction EUV tool
resistion   7/11/2011 6:45:24 PM
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The NXE 3100 only at 7 wph.

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