LONDON – Semiconductor R&D consortium Sematech has announced the appointment of Stefan Wurm as director of lithography. Wurm was previously associate director of lithography and is an assignee from Globalfoundries Inc. where he is a principal member of the technical staff.
The Sematech lithography program is an enabler of extreme ultraviolet infrastructure development.
In the late 1990s, Wurm joined Sematech's International 300 mm Initiative (I300I), where he was responsible for 300-mm metrology tool equipment demonstrations. Prior to being appointed associate director in 2008, he served four years as Sematech's extreme ultraviolet (EUV) program manager.
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