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R&D group begins TSV chip pilot production

10/11/2011 05:58 AM EDT
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resistion
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re: R&D group begins TSV chip pilot production
resistion   10/11/2011 10:52:25 PM
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No industry involvement means faster, more independent development but harder for acceptance.

docdivakar
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re: R&D group begins TSV chip pilot production
docdivakar   10/20/2011 7:48:30 PM
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Seems like a good start at 10um TSV. The article leaves out subsequent metallization / via fill capability of ASSID. I also would like to know the planarization of the metal fill in the TSV. MP Divakar

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