SAN FRANCISCO—Chip equipment vendor Tegal Corp. said Friday (Dec. 30) it has sold more than 30 patents from its nanolayer deposition (NLD) patent portfolio for about $3.6 million.
Tegal (Petaluma, Calif.) did not identify the buyers of the patents. The company announced in September that it would seek to sell the patents, part of a sell off strategy that has seen the firm sell its legacy thin-film etch and physical vapor deposition product lines to OEM Group Inc. in March 2010 and its deep reactive ion etch assets to SPTS earlier this year.
Tegal said Friday it still hopes to fetch about $400,0000 more for its five or so remaining NLD patents. Discussions are ongoing for placement of Lot 4 of the portfolio, which applies to copper barrier and low-k dielectric technology, Tegal said.
"Interest in Lot 4 is coming primarily from IC device manufacturers, whereas interest in Lots 1 through 3 was driven largely by equipment manufacturers," said Robert Ditizio, Tegal's chief technologist, in a statement.