SAN FRANCISCO—Lithography tool vendor ASML Holding NV's Brion Technologies division Monday (Feb. 13) announced a mask optimization software tool purports to offer seamless use of multiple optical proximity correction (OPC) techniques in a single mask tapeout.
ASML (Veldhoven, the Netherlands) said Tachyon Flexible Mask Optimization (FMO) permits the use of advanced and computationally intensive OPC in those local areas where they provide maximum benefit. The use of different OPC techniques tailored to localized imaging challenges can result in tapeout cycle time which is just one-third of alternative technologies, and which results in the same desired level of imaging performance, according to the firm.
"We are excited by the new applications and use cases that are enabled by Tachyon FMO’s defect-free boundary healing," said Jim Koonmen, Brion's general manager, in a statement. "Mask correction at 2x nm and below brings with it some very significant computational challenges, so we continue to innovate in order to help our customers successfully manage these challenges while simultaneously achieving their desired imaging and cost targets."
ASML said the key to Tachyon FMO enabling the use of multiple mask correction approaches is the high quality boundary healing between the different correction areas. Thus, different areas within a design can have different correction techniques applied without inducing trouble-areas, known as hotspots, in the boundary regions between them, the company said. Brion has developed a solution that detects and manipulates hotspots and has the ability to cleanly reinsert the corrected hotspots back into the full chip design without introducing new defects due to proximity effects of neighboring patterns, according to ASML.
Tachyon FMO enables a number of flexible application modes such as repair, insertion of known-good libraries, efficient correction of mask revisions, and applying advanced OPC techniques in highly localized areas where such techniques provide real benefit, ASML said.
Pricing information for the product was not provided.